The JEOL JXA-8530F Plus is a state of the art Electron Probe Microanalyser (EPMA) capable of performing quantitative elemental analysis of small volumes (1-5μm) in solid materials.
It is equipped with a Schottky Field Emission (FE) gun which greatly enhances available image resolution over a wide range of analytical conditions (kV, probe current). It is therefore especially suited to performing analysis at low kV, enabling quantitative analysis of fine grained features.
Number of WDS spectrometers: 5, (2-4 crystals per spectrometer)
EDS Detectors: 1, high count rate, 30mm JEOL SDD
Element analysis range: B to U
Probe current stability: <0.3%/hr
Secondary electron image resolution: 3nm @ 30kV; 20nm @ 10kV, 10n; 50nm @ 10kV, 100nA
Magnification: x40 to x 300,000
Image pixel resolution: up to 5120 x 3840
All new users receive one-on-one training.
Attending the Introduction to Quantitative Microprobe Analysis workshop will give users a deeper understanding of SEM and help users to improve the quality of their data.