JEOL 8530F Plus Electron Probe Microanalyser

The JEOL JXA-8530F Plus is a state of the art Electron Probe Microanalyser (EPMA) capable of performing quantitative elemental analysis of small volumes (1-5µm) in solid materials.

It is equipped with a Schottky Field Emission (FE) gun which greatly enhances available image resolution over a wide range of analytical conditions (kV, probe current). It is therefore especially suited to performing analysis at low kV, enabling quantitative analysis of fine grained features.

Specifications

Accelerating Voltage	1 to 30kV (0.1 kV steps)
Number of WDS spectrometers	5, (2-4 crystals per spectrometer)
EDS Detectors	1, high count rate, 30mm² JEOL SDD
Element analysis range	B to U
Probe current stability	<0.3%/hr
Secondary electron image resolution	3nm @ 30kV 20nm @ 10kV, 10nA 50nm @ 10kV, 100nA
Magnification	x40 to x 300,000
Image pixel resolution	up to 5120 x 3840

Training

All new users receive one-on-one training on this instrument. Attending the Introduction to Quantitative Microprobe Analysis workshop will give users a deeper understanding of EPMA and help you improve the quality of your data.