Introduction to Quantitative Microprobe Analysis

Participants will need to have attended the Introduction to Scanning Electron Microscopy (Physical Sciences) workshop, or have a basic understanding SEM and EDS, prior to attending this workshop.

Due to COVID-19 restrictions, this workshop is currently being offered as a half-day, theory course.

This workshop will provide you with background information and practical advice for the basic operation of an electron probe X-ray microanalyser.

By the end of this course, participants are expected to be able to:

  • understand how an electron microprobe works
  • prepare samples for quantitative microprobe analysis
  • perform standard calibration, sample analysis and results acquisition.

Main topics covered

  • Principle of Wavelength Dispersive Spectroscopy (WDS)
  • Sample preparation for microprobe analysis
  • Matrix correction and quantification process
  • Detection limit, analysis precision and accuracy


ANU students: AUD$90.00 per person.

Non-ANU students: AUD$209.00 per person ($190 + GST).

Scanning Electron Microscopes and Electron Microprobe

Maximum number of students: 



 Josie Smith
 02 6125 3543
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Updated:  17 January 2021/Responsible Officer:  Director CAM/Page Contact:  CAM Web Admin