Introduction to Scanning Electron Microscopy (Physical Sciences)

By the end of this course participants are expected to be able to:

  • identify the various components making up an SEM
  • understand how an SEM works
  • understand the processes of signal generation and detection in the SEM
  • understand how to optimise the performance of the SEM.

Specific topics covered:

  • How does the SEM work?
  • The Electron Gun
  • The Electron Column
  • The Vacuum System
  • Signals in the SEM
  • Aberrations
  • Depth of Field
  • Optimising SEM Conditions
    • Image Resolution
    • Low Voltage SEM



ANU students: AUD$150.00 per person.

Non-ANU students: AUD$275.00 per person ($250 + GST).

Scanning Electron Microscopes and Electron Microprobe

Applications using SEM

Maximum number of students: 


 Josie Smith
 02 6125 3543
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Updated:  17 January 2021/Responsible Officer:  Director CAM/Page Contact:  CAM Web Admin