Specifications

This FESEM is used for ultra high resolution application at low and high kV.

It is also used for electron back-scattered diffraction (EBSD), quantitative X-ray analysis, mapping, and variable pressure applications.

Features on this instrument include:

• Five-axis motorised stage
• Turbo and ion pump vacuum system
• In-lens and below lens secondary electron detectors
• Angular sensitive backscatter detector (AsB)
• Energy sensitive backscatter detector (EsB)
• Gas injection needle for variable pressure/charge compensation
• Oxford Instruments INCA x-act EDXA system, 10mm² Silicon Drift Detector (ATW, 129eV)
• Oxford Instruments HKL EBSD camera
• IR Chamber scope

Training

All new users receive one-on-one training.

Attending the Introduction to Scanning Electron Microscopy workshop will give users a deeper understanding of SEM and help users to improve the quality of their data.

Applications

• CLEM (correlative light and electron microscopy)
• Electron back-scattered diffraction (EBSD)
• X-ray analysis and X-ray mapping
• High-resolution, low voltage imaging on non-conductive materials.