Introduction to Quantitative Microprobe Analysis

This workshop will provide you with background information and practical advice for the basic operation of an electron probe X-ray microanalyser.

By the end of this course, participants are expected to be able to:

  • understand how an electron microprobe works
  • prepare samples for quantitative microprobe analysis
  • perform standard calibration, sample analysis and results acquisition.

Main topics covered

  • Principle of Wavelength Dispersive Spectroscopy (WDS)
  • Sample preparation for microprobe analysis
  • Matrix correction and quantification process
  • Detection limit, analysis precision and accuracy