The Hitachi SU7000 Field Emission Scanning Electron Microscope (SEM) is an advanced platform for high-resolution imaging and microanalytical characterisation at the Centre for Advanced Microscopy (CAM). The system features a large specimen chamber capable of accommodating multiple samples or large specimens, enabling efficient batch analysis. 

The SU7000 is equipped with Secondary Electron (SE) and Backscattered Electron (BSE) detectors for high-resolution surface and compositional imaging. It also integrates a Deben Centaurus cathodoluminescence (CL) detector (400–1200 nm), allowing for optical property characterisation alongside electron imaging. 

For elemental analysis, the system includes a powerful multi-detector EDS configuration comprising one Oxford Instruments Ultim Max Infinity 100 detector and two Bruker XFlash® 760 detectors. The Oxford detector is dedicated to quantitative EDS analysis, supporting standard-based compositional measurements and automated spot analysis. The Bruker detectors are optimised for rapid, high-throughput EDS mapping, enabling fast large-area compositional mapping and automated mineralogy workflows.  

A key capability of the SU7000 is its integration with AMICS (Advanced Mineral Identification and Characterisation System), supporting automated mineralogy workflows including mineral identification, mapping, quantification, elemental deportment, particle size distribution, and phase association analysis with consistent and reproducible outputs. 

The system is further equipped with the Quorum PP3010 Cryo Sample Preparation System, enabling cryo-SEM imaging of hydrated, biological, beam-sensitive, and volatile samples while preserving microstructures and minimising preparation artefacts. In addition, low vacuum operation allows imaging and analysis of non-conductive or uncoated specimens. 

Applications 

• High-resolution SE and BSE imaging for surface morphology and compositional contrast 

• High-throughput EDS mapping and automated EDS spot analysis 

• Automated mineralogy including mineral ientification, quantification, size distribution, element deportment and phase association studies 

• Cryo-SEM imaging of hydrated, biological, and beam-sensitive materials 

• Large-area mapping and batch analysis of multiple samples 

• Cathodoluminescence (CL) imaging for mineralogical and optical property analysis 

• Correlative microanalysis workflows combining imaging, spectroscopy and mineralogy 

Image

Hitachi SU7000 suite at CAM, ANU. Multi-detector EDS (Bruker and Oxford), the Deben Centaurus CL Detector, Quorum PP3010 and the AMICS rack with SEM control PCs.